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Reliability of MEMS

Testing of Materials and Devices

Paperback Engels 2013 9783527335015
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This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies –– nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.


Aantal pagina's:324
Uitgever:John Wiley & Sons


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Evaluation of Mechanical Properties of MEMS Materials and Their Standardization

Elastoplastic Indentation Contact Mechanics of Homogeneous Materials and Coating–Substrate Systems

Thin film Characterization Using the Bulge Test

Uniaxial Tensile Test for MEMS Materials

On–chip Testing of MEMS

Reliability of a Capacitive Pressure Sensor

Inertial Sensors

High–Accuracy, High–Reliability MEMS Accelerometer Reliability of MEMS Variable Optical Attenuator

Reliability of MEMS Variable Optical Attenuator (pages 239–266)

Eco Scan MEMS Resonant Mirror

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        Reliability of MEMS