<p style="MARGIN: 0px">ABOUT THE AUTHORS XvII</p> <p style="MARGIN: 0px">1 CRYSTAL PROPERTIES AND GROWTH</p> <p style="MARGIN: 0px">OF SEMICONDUCTORS 1</p> <p style="MARGIN: 0px">1.1 Semiconductor Materials 1</p> <p style="MARGIN: 0px">1.2 Crystal Lattices 3</p> <p style="MARGIN: 0px">1.3 Bulk Crystal Growth 12</p> <p style="MARGIN: 0px">1.4 epitaxial Growth 17</p> <p style="MARGIN: 0px">1.2.1 Periodic Structures 3</p> <p style="MARGIN: 0px">1.2.2 Cubic Lattices 5</p> <p style="MARGIN: 0px">1.2.3 Planes and directions 7</p> <p style="MARGIN: 0px">1.2.4 The diamond Lattice 9</p> <p style="MARGIN: 0px">1.3.1 Starting Materials 12</p> <p style="MARGIN: 0px">1.3.2 Growth of Single-Crystal Ingots 13</p> <p style="MARGIN: 0px">1.3.3 wafers 14</p> <p style="MARGIN: 0px">1.3.4 doping 16</p> <p style="MARGIN: 0px">1.4.1 Lattice-Matching in epitaxial Growth 17</p> <p style="MARGIN: 0px">1.4.2 vapor-Phase epitaxy 19</p> <p style="MARGIN: 0px">1.4.3 Molecular Beam epitaxy 22</p> <p style="MARGIN: 0px">1.5 wave Propagation in discrete, Periodic Structures 24</p> <p style="MARGIN: 0px">2 ATOMS AND ELECTRONS 32</p> <p style="MARGIN: 0px">2.1 Introduction to Physical Models 33</p> <p style="MARGIN: 0px">2.2 experimental Observations 34</p> <p style="MARGIN: 0px">2.3 The Bohr Model 37</p> <p style="MARGIN: 0px">2.4 Quantum Mechanics 41</p> <p style="MARGIN: 0px">2.2.1 The Photoelectric effect 34</p> <p style="MARGIN: 0px">2.2.2 Atomic Spectra 36</p> <p style="MARGIN: 0px">2.5 Atomic Structure and the Periodic Table 49</p> <p style="MARGIN: 0px">2.4.1 Probability and the Uncertainty Principle 41</p> <p style="MARGIN: 0px">2.4.2 The Schrödinger wave equation 43</p> <p style="MARGIN: 0px">2.4.3 Potential well Problem 45</p> <p style="MARGIN: 0px">2.4.4 Tunneling 48</p> <p style="MARGIN: 0px">2.5.1 The hydrogen Atom 50</p> <p style="MARGIN: 0px">2.5.2 The Periodic Table 52</p> <p style="MARGIN: 0px">3 ENERGY BANDS AND CHARGE CARRIERS IN SEMICONDUCTORS 63</p> <p style="MARGIN: 0px">3.1 Bonding Forces and energy Bands in Solids 63</p> <p style="MARGIN: 0px">3.2 Charge Carriers in Semiconductors 74</p> <p style="MARGIN: 0px">3.3 Carrier Concentrations 89</p> <p style="MARGIN: 0px">3.4 drift of Carriers in electric and Magnetic Fields 100</p> <p style="MARGIN: 0px">3.1.1 Bonding Forces in Solids 64</p> <p style="MARGIN: 0px">3.1.2 energy Bands 66</p> <p style="MARGIN: 0px">3.1.3 Metals, Semiconductors, and Insulators 69</p> <p style="MARGIN: 0px">3.1.4 direct and Indirect Semiconductors 70</p> <p style="MARGIN: 0px">3.1.5 variation of energy Bands with Alloy Composition 72</p> <p style="MARGIN: 0px">3.2.1 electrons and holes 74</p> <p style="MARGIN: 0px">3.2.2 effective Mass 79</p> <p style="MARGIN: 0px">3.2.3 Intrinsic Material 83</p> <p style="MARGIN: 0px">3.2.4 extrinsic Material 84</p> <p style="MARGIN: 0px">3.2.5 electrons and holes in Quantum wells 87</p> <p style="MARGIN: 0px">3.3.1 The Fermi Level 89</p> <p style="MARGIN: 0px">3.3.2 electron and hole Concentrations at equilibrium 92</p> <p style="MARGIN: 0px">3.3.3 Temperature dependence of Carrier Concentrations 97</p> <p style="MARGIN: 0px">3.3.4 Compensation and Space Charge neutrality 99</p> <p style="MARGIN: 0px">3.4.1 Conductivity and Mobility 100</p> <p style="MARGIN: 0px">3.4.2 drift and Resistance 105</p> <p style="MARGIN: 0px">3.4.3 effects of Temperature and doping on Mobility 106</p> <p style="MARGIN: 0px">3.4.4 high-Field effects 109</p> <p style="MARGIN: 0px">3.4.5 The hall effect 109</p> <p style="MARGIN: 0px">3.5 Invariance of the Fermi Level at equilibrium 111</p> <p style="MARGIN: 0px">4 EXCESS CARRIERS IN SEMICONDUCTORS 122</p> <p style="MARGIN: 0px">4.1 Optical Absorption 122</p> <p style="MARGIN: 0px">4.2 Luminescence 125</p> <p style="MARGIN: 0px">4.3 Carrier Lifetime and Photoconductivity 128</p> <p style="MARGIN: 0px">4.4 diffusion of Carriers 137</p> <p style="MARGIN: 0px">4.2.1 Photoluminescence 126</p> <p style="MARGIN: 0px">4.2.2 electroluminescence 128</p> <p style="MARGIN: 0px">4.3.1 direct Recombination of electrons and holes 129</p> <p style="MARGIN: 0px">4.3.2 Indirect Recombination; Trapping 131</p> <p style="MARGIN: 0px">4.3.3 Steady State Carrier Generation; Quasi-Fermi Levels 134</p> <p style="MARGIN: 0px">4.3.4 Photoconductive devices 136</p> <p style="MARGIN: 0px">4.4.1 diffusion Processes 138</p> <p style="MARGIN: 0px">4.4.2 diffusion and drift of Carriers; Built-in Fields 140</p> <p style="MARGIN: 0px">4.4.3 diffusion and Recombination; The Continuity equation 143</p> <p style="MARGIN: 0px">4.4.4 Steady State Carrier Injection; diffusion Length 145</p> <p style="MARGIN: 0px">4.4.5 The haynes–Shockley experiment 147</p> <p style="MARGIN: 0px">4.4.6 Gradients in the Quasi-Fermi Levels 150</p> <p style="MARGIN: 0px">5 JUNCTIONS159</p> <p style="MARGIN: 0px">5.1 Fabrication of p-n Junctions 159</p> <p style="MARGIN: 0px">5.2 equilibrium Conditions 174</p> <p style="MARGIN: 0px">5.3 Forward- and Reverse-Biased </p> <p style="MARGIN: 0px">5.4 Reverse-Bias Breakdown 200</p> <p style="MARGIN: 0px">5.5 Transient and A-C Conditions 209</p> <p style="MARGIN: 0px">5.6 deviations from the Simple Theory 222</p> <p style="MARGIN: 0px">5.7 Metal–Semiconductor Junctions 231</p> <p style="MARGIN: 0px">5.1.1 Thermal Oxidation 160</p> <p style="MARGIN: 0px">5.1.2 diffusion 161</p> <p style="MARGIN: 0px">5.1.3 Rapid Thermal Processing 163</p> <p style="MARGIN: 0px">5.1.4 Ion Implantation 164</p> <p style="MARGIN: 0px">5.1.5 Chemical vapor deposition (Cvd) 167</p> <p style="MARGIN: 0px">5.1.6 Photolithography 168</p> <p style="MARGIN: 0px">5.1.7 etching 171</p> <p style="MARGIN: 0px">5.1.8 Metallization 173</p> <p style="MARGIN: 0px">5.2.1 The Contact Potential 175</p> <p style="MARGIN: 0px">5.2.2 equilibrium Fermi Levels 180</p> <p style="MARGIN: 0px">5.2.3 Space Charge at a Junction 180</p> <p style="MARGIN: 0px">Junctions; Steady State Conditions 185</p> <p style="MARGIN: 0px">5.3.1 Qualitative description of Current Flow at a Junction 185</p> <p style="MARGIN: 0px">5.3.2 Carrier Injection 189</p> <p style="MARGIN: 0px">5.3.3 Reverse Bias 198</p> <p style="MARGIN: 0px">5.4.1 Zener Breakdown 201</p> <p style="MARGIN: 0px">5.4.2 Avalanche Breakdown 202</p> <p style="MARGIN: 0px">5.4.3 Rectifiers 205</p> <p style="MARGIN: 0px">5.4.4 The Breakdown diode 208</p> <p style="MARGIN: 0px">5.5.1 Time variation of Stored Charge 209</p> <p style="MARGIN: 0px">5.5.2 Reverse Recovery Transient 212</p> <p style="MARGIN: 0px">5.5.3 Switching diodes 216</p> <p style="MARGIN: 0px">5.5.4 Capacitance of p-n Junctions 216</p> <p style="MARGIN: 0px">5.5.5 The varactor diode 221</p> <p style="MARGIN: 0px">5.6.1 effects of Contact Potential on Carrier Injection 223</p> <p style="MARGIN: 0px">5.6.2 Recombination and Generation in the Transition Region 225</p> <p style="MARGIN: 0px">5.6.3 Ohmic Losses 227</p> <p style="MARGIN: 0px">5.6.4 Graded Junctions 228</p> <p style="MARGIN: 0px">5.7.1 Schottky Barriers 231</p> <p style="MARGIN: 0px">5.7.2 Rectifying Contacts 233</p> <p style="MARGIN: 0px">5.7.3 Ohmic Contacts 235</p> <p style="MARGIN: 0px">5.7.4 Typical Schottky Barriers 237</p> <p style="MARGIN: 0px">5.8 heterojunctions 238</p> <p style="MARGIN: 0px">6 FIELD-EFFECT TRANSISTORS 257</p> <p style="MARGIN: 0px">6.1 Transistor Operation 258</p> <p style="MARGIN: 0px">6.2 The Junction FeT 260</p> <p style="MARGIN: 0px">6.3 The Metal—Semiconductor FeT 267</p> <p style="MARGIN: 0px">6.4 The Metal—Insulator—Semiconductor FeT 271</p> <p style="MARGIN: 0px">6.5 The MOS Field-effect Transistor 299</p> <p style="MARGIN: 0px">6.6 Advanced MOSFeT Structures 330</p> <p style="MARGIN: 0px">6.1.1 The Load Line 258</p> <p style="MARGIN: 0px">6.1.2 Amplification and Switching 259</p> <p style="MARGIN: 0px">6.2.1 Pinch-off and Saturation 261</p> <p style="MARGIN: 0px">6.2.2 Gate Control 263</p> <p style="MARGIN: 0px">6.2.3 Current—voltage Characteristics 265</p> <p style="MARGIN: 0px">6.3.1 The GaAs MeSFeT 267</p> <p style="MARGIN: 0px">6.3.2 The high electron Mobility Transistor (heMT) 268</p> <p style="MARGIN: 0px">6.3.3 Short Channel effects 270</p> <p style="MARGIN: 0px">6.4.1 Basic Operation and Fabrication 271</p> <p style="MARGIN: 0px">6.4.2 The Ideal MOS Capacitor 275</p> <p style="MARGIN: 0px">6.4.3 effects of Real Surfaces 286</p> <p style="MARGIN: 0px">6.4.4 Threshold voltage 289</p> <p style="MARGIN: 0px">6.4.5 MOS Capacitance—voltage Analysis 291</p> <p style="MARGIN: 0px">6.4.6 Time-dependent Capacitance Measurements 295</p> <p style="MARGIN: 0px">6.4.7 Current—voltage Characteristics of MOS Gate Oxides 296</p> <p style="MARGIN: 0px">6.5.1 Output Characteristics 299</p> <p style="MARGIN: 0px">6.5.2 Transfer Characteristics 302</p> <p style="MARGIN: 0px">6.5.3 Mobility Models 305</p> <p style="MARGIN: 0px">6.5.4 Short Channel MOSFeT I—V Characteristics 307</p> <p style="MARGIN: 0px">6.5.5 Control of Threshold voltage 309</p> <p style="MARGIN: 0px">6.5.6 Substrate Bias effects–the “body” effect 312</p> <p style="MARGIN: 0px">6.5.7 Subthreshold Characteristics 316</p> <p style="MARGIN: 0px">6.5.8 equivalent Circuit for the MOSFeT 318</p> <p style="MARGIN: 0px">6.5.9 MOSFeT Scaling and hot electron effects 321</p> <p style="MARGIN: 0px">6.5.10 drain-Induced Barrier Lowering 325</p> <p style="MARGIN: 0px">6.5.11 Short Channel effect and narrow width effect 327</p> <p style="MARGIN: 0px">6.5.12 Gate-Induced drain Leakage 329</p> <p style="MARGIN: 0px">6.6.1 Metal Gate-high-k 330</p> <p style="MARGIN: 0px">6.6.2 enhanced Channel Mobility Materials and Strained Si FeTs 331</p> <p style="MARGIN: 0px">6.6.3 SOI MOSFeTs and FinFeTs 333</p> <p style="MARGIN: 0px">7 BIPOLAR JUNCTION TRANSISTORS 348</p> <p style="MARGIN: 0px">7.1 Fundamentals of BJT Operation 348</p> <p style="MARGIN: 0px">7.2 Amplification with BJTs 352</p> <p style="MARGIN: 0px">7.3 BJT Fabrication 355</p> <p style="MARGIN: 0px">7.4 Minority Carrier distributions and Terminal Currents 358</p> <p style="MARGIN: 0px">7.5 Generalized Biasing 367</p> <p style="MARGIN: 0px">7.6 Switching 375</p> <p style="MARGIN: 0px">7.7 Other Important effects 380</p> <p style="MARGIN: 0px">7.8 Frequency Limitations of Transistors 394</p> <p style="MARGIN: 0px">7.4.1 Solution of the diffusion equation in the Base Region 359</p> <p style="MARGIN: 0px">7.4.2 evaluation of the Terminal Currents 361</p> <p style="MARGIN: 0px">7.4.3 Approximations of the Terminal Currents 364</p> <p style="MARGIN: 0px">7.4.4 Current Transfer Ratio 366</p> <p style="MARGIN: 0px">7.5.1 The Coupled-diode Model 368</p> <p style="MARGIN: 0px">7.5.2 Charge Control Analysis 373</p> <p style="MARGIN: 0px">7.6.1 Cutoff 376</p> <p style="MARGIN: 0px">7.6.2 Saturation 377</p> <p style="MARGIN: 0px">7.6.3 The Switching Cycle 378</p> <p style="MARGIN: 0px">7.6.4 Specifications for Switching Transistors 379</p> <p style="MARGIN: 0px">7.7.1 drift in the Base Region 381</p> <p style="MARGIN: 0px">7.7.2 Base narrowing 382</p> <p style="MARGIN: 0px">7.7.3 Avalanche Breakdown 383</p> <p style="MARGIN: 0px">7.7.4 Injection Level; Thermal effects 385</p> <p style="MARGIN: 0px">7.7.5 Base Resistance and emitter Crowding 386</p> <p style="MARGIN: 0px">7.7.6 Gummel—Poon Model 388</p> <p style="MARGIN: 0px">7.7.7 Kirk effect 391</p> <p style="MARGIN: 0px">7.8.1 Capacitance and Charging Times 394</p> <p style="MARGIN: 0px">7.8.2 Transit Time effects 397</p> <p style="MARGIN: 0px">7.8.3 webster effect 398</p> <p style="MARGIN: 0px">7.8.4 high-Frequency Transistors 398</p> <p style="MARGIN: 0px">7.9 heterojunction Bipolar Transistors 400</p> <p style="MARGIN: 0px">8 OPTOELECTRONIC DEVICES 410</p> <p style="MARGIN: 0px">8.1 Photodiodes 410</p> <p style="MARGIN: 0px">8.1.1 Current and voltage in an Illuminated Junction 411</p> <p style="MARGIN: 0px">8.1.2 Solar Cells 414</p> <p style="MARGIN: 0px">8.1.3 Photodetectors 417</p> <p style="MARGIN: 0px">8.1.4 Gain, Bandwidth, and Signal-to-noise Ratio </p> <p style="MARGIN: 0px">of Photodetectors 419</p> <p style="MARGIN: 0px">8.2 Light-emitting diodes 422</p> <p style="MARGIN: 0px">8.3 Lasers 430</p> <p style="MARGIN: 0px">8.4 Semiconductor Lasers 434</p> <p style="MARGIN: 0px">8.2.1 Light-emitting Materials 423</p> <p style="MARGIN: 0px">8.2.2 Fiber-Optic Communications 427</p> <p style="MARGIN: 0px">8.4.1 Population Inversion at a Junction 435</p> <p style="MARGIN: 0px">8.4.2 emission Spectra for p-n Junction Lasers 437</p> <p style="MARGIN: 0px">8.4.3 The Basic Semiconductor Laser 438</p> <p style="MARGIN: 0px">8.4.4 heterojunction Lasers 439</p> <p style="MARGIN: 0px">8.4.5 Materials for Semiconductor Lasers 442</p> <p style="MARGIN: 0px">8.4.6 Quantum Cascade Lasers 444</p> <p style="MARGIN: 0px">9 INTEGRATED CIRCUITS 452</p> <p style="MARGIN: 0px">9.1 Background 453</p> <p style="MARGIN: 0px">9.2 evolution of Integrated Circuits 456</p> <p style="MARGIN: 0px">9.3 Monolithic device elements 459</p> <p style="MARGIN: 0px">9.1.1 Advantages of Integration 453</p> <p style="MARGIN: 0px">9.1.2 Types of Integrated Circuits 455</p> <p style="MARGIN: 0px">9.4 Charge Transfer devices 480</p> <p style="MARGIN: 0px">9.5 Ultra Large-Scale Integration (ULSI) 485</p> <p style="MARGIN: 0px">9.6 Testing, Bonding, and Packaging 510</p> <p style="MARGIN: 0px">9.3.1 CMOS Process Integration 459</p> <p style="MARGIN: 0px">9.3.2 Integration of Other Circuit elements 474</p> <p style="MARGIN: 0px">9.4.1 dynamic effects in MOS Capacitors 481</p> <p style="MARGIN: 0px">9.4.2 The Basic CCd 482</p> <p style="MARGIN: 0px">9.4.3 Improvements on the Basic Structure 483</p> <p style="MARGIN: 0px">9.4.4 Applications of CCds 484</p> <p style="MARGIN: 0px">9.5.1 Logic devices 489</p> <p style="MARGIN: 0px">9.5.2 Semiconductor Memories 497</p> <p style="MARGIN: 0px">9.6.1 Testing 511</p> <p style="MARGIN: 0px">9.6.2 wire Bonding 511</p> <p style="MARGIN: 0px">9.6.3 Flip-Chip Techniques 515</p> <p style="MARGIN: 0px">9.6.4 Packaging 515</p> <p style="MARGIN: 0px">10 HIGH-FREQUENCY, HIGH-POWER AND</p> <p style="MARGIN: 0px">NANOELECTRONIC DEVICES 521</p> <p style="MARGIN: 0px">10.1 Tunnel diodes 521</p> <p style="MARGIN: 0px">10.2 The IMPATT diode 525</p> <p style="MARGIN: 0px">10.3 The Gunn diode 528</p> <p style="MARGIN: 0px">10.1.1 degenerate Semiconductors 521</p> <p style="MARGIN: 0px">10.3.1 The Transferred-electron Mechanism 528</p> <p style="MARGIN: 0px">10.3.2 Formation and drift of Space Charge domains 531</p> <p style="MARGIN: 0px">10.4 The p-n-p-n diode 533</p> <p style="MARGIN: 0px">10.5 The Semiconductor-Controlled Rectifier 539</p> <p style="MARGIN: 0px">10.6 Insulated-Gate Bipolar Transistor 541</p> <p style="MARGIN: 0px">10.7 nanoelectronic devices 544</p> <p style="MARGIN: 0px">10.4.1 Basic Structure 533</p> <p style="MARGIN: 0px">10.4.2 The Two-Transistor Analogy 534</p> <p style="MARGIN: 0px">10.4.3 variation of a with Injection 535</p> <p style="MARGIN: 0px">10.4.4 Forward-Blocking State 536</p> <p style="MARGIN: 0px">10.4.5 Conducting State 537</p> <p style="MARGIN: 0px">10.4.6 Triggering Mechanisms 538</p> <p style="MARGIN: 0px">10.5.1 Turning off the SCR 540</p> <p style="MARGIN: 0px">10.7.1 Zero-dimensional Quantum dots 544</p> <p style="MARGIN: 0px">10.7.2 One-dimensional Quantum wires 546</p> <p style="MARGIN: 0px">10.7.3 Two-dimensional Layered Crystals 547</p> <p style="MARGIN: 0px">10.7.4 Spintronic Memory 548</p> <p style="MARGIN: 0px">10.7.5 nanoelectronic Resistive Memory 550</p> <p style="MARGIN: 0px">AppendIces</p> <p style="MARGIN: 0px">I. definitions of Commonly Used Symbols 555</p> <p style="MARGIN: 0px">II. Physical Constants and Conversion Factors 559</p> <p style="MARGIN: 0px">III. Properties of Semiconductor Materials 560</p> <p style="MARGIN: 0px">Iv. derivation of the density of States in the Conduction </p> <p style="MARGIN: 0px">v. derivation of Fermi—dirac Statistics 566</p> <p style="MARGIN: 0px">vI. dry and wet Thermal Oxide Thickness Grown on </p> <p style="MARGIN: 0px">vII. Solid Solubilities of Impurities in Si 571</p> <p style="MARGIN: 0px">vIII. diffusivities of dopants in Si and SiO2 572</p> <p style="MARGIN: 0px">IX. Projected Range and Straggle as Function of Implant </p> <p style="MARGIN: 0px">Answers to Selected Self Quiz Questions 576</p> <p style="MARGIN: 0px">Index 581</p> <p style="MARGIN: 0px">Band 561</p> <p style="MARGIN: 0px">Si (100) as a Function of Time and Temperature 569</p> <p style="MARGIN: 0px">energy in Si 574</p>