Volker Saile
- Auteur
Geschreven door Volker Saile
Hans H. Gatzen
Volker Saile
Jurg Leuthold
Jürg Leuthold
Micro and Nano Fabrication
For Micro and Nano Electro-Mechanical Systems (MNEMS) production, each product requires a unique process technology.
This book provides a comprehensive insight into the tools required for fabricating MNEMS systems and the process technologies applied. Meer
This book provides a comprehensive insight into the tools required for fabricating MNEMS systems and the process technologies applied. Meer