Volker Saile
- Auteur
Geschreven door Volker Saile
Hans H. Gatzen
Volker Saile
Jurg Leuthold
Jürg Leuthold
Micro and Nano Fabrication
€ 144,99
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied.
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Hans H. Gatzen€ 144,99