Osamu Tabata
- Auteur
Boeken van Osamu Tabata
Volker Saile
Ulrike Wallrabe
Osamu Tabata
LIGA and its Applications
Met een beschrijving van de technische aspecten, de geschiktheid en inpasbaarheid van diverse soorten van gebruikte technieken laat dit handboek zien hoe u strategieën kunt optimaliseren en hoe u technieken en manieren van assemblage - voor het bereiken van een complexe combinaties zoals driedimensionale structuren - kunt bereiken met eenvoudige stappen in de productie.
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Henry Baltes
Oliver Brand
Gary K. Fedder
Christofer Hierold
Jan G. Korvink
Osamu Tabata
Enabling Technology for MEMS and Nanodevices
Microstructures, electronics, nanotechnology – these vast fields of research are growing together as the size gap narrows and many different materials are combined.
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Henry Baltes
Oliver Brand
Gary K. Fedder
Christofer Hierold
Jan G. Korvink
Osamu Tabata
Cmos – Mems
This edition of ′CMOS–MEMS′ was originally published in the successful series ′Advanced Micro & Nanosystems′. Here, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of
MEMS is covered from all angles. Meer
MEMS is covered from all angles. Meer
Osamu Tabata
Toshiyuki Tsuchiya
Reliability of MEMS
The first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of MEMS microelectromechanical materials, components and devices.
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Henry Baltes
Oliver Brand
Gary K. Fedder
Christofer Hierold
Jan G. Korvink
Osamu Tabata
Detlef Löhe
Jürgen Hausselt
Microengineering of Metals and Ceramics, Part I
In this volume, authors from three major competence centres for microengineering illustrate step by step the process from designing and simulating microcomponents of metallic and ceramic materials to replicating micro–scale components by injection molding.
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