Lars Rebohle,
Slawomir Prucnal,
Denise Reichel
Flash Lamp Annealing
From Basics to Applications
Paperback Engels 2020 9783030233013Levertijd ongeveer 9 werkdagen
Gratis verzonden
Samenvatting
This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.
Specificaties
ISBN13:9783030233013
Taal:Engels
Bindwijze:paperback
Uitgever:Springer International Publishing
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Inhoudsopgave
<p>Introduction.- Technological background.- Basic components.- Flash lamps.- Process management and process control.- FLA assisted deposition.- Temperature.- Thermal budget.- Temperature measurements.- Temperature simulations.- FLA for semiconductors.- Defect engineering.- Doping.- Crystallization.- Semiconductor nanostructures.- Beyond semiconductors.- Transparent conducting oxides.- Metallic films.- High-k materials and dielectrics.- Flexible substrates.- Outlook.<br></p>
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