Scanning Electron Microscopy

Physics of Image Formation and Microanalysis

Gebonden Engels 1998 2e druk 9783540639763
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Samenvatting

Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

Specificaties

ISBN13:9783540639763
Taal:Engels
Bindwijze:gebonden
Aantal pagina's:529
Uitgever:Springer Berlin Heidelberg
Druk:2

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Inhoudsopgave

Electron Optics of a Scanning Electron Microscope.- Electron Scattering and Diffusion.- Emission of Backscattered and Secondary Electrons.- Electron Detectors and Spectrometers.- Image Contrast and Signal Processing.- Electron-Beam-Induced Current and Cathodoluminescence.- Special Techniques in SEM.- Crystal Structure Analysis by Diffraction.- Elemental Analysis and Imaging with X-Rays.

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€ 336,99
Levertijd ongeveer 9 werkdagen
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        Scanning Electron Microscopy