Rainer Behrisch,
Wolfgang Eckstein
Sputtering by Particle Bombardment
Experiments and Computer Calculations from Threshold to MeV Energies
Paperback Engels 2010 9783642079443Levertijd ongeveer 9 werkdagen
Gratis verzonden
Samenvatting
This book provides a long-needed survey of new results. Especially welcome is a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields, which is useful for researchers who need sputtering yields for physics research or applied problems. The book offers a critical review of computational methods for calculating sputtering yields and also includes molecular dynamics calculations.
Specificaties
ISBN13:9783642079443
Taal:Engels
Bindwijze:paperback
Aantal pagina's:509
Uitgever:Springer Berlin Heidelberg
Druk:0
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Inhoudsopgave
Introduction and Overview (R. Behrisch, W. Eckstein).- Computer Simulation of the Sputtering Process (W. Eckstein, H.M. Urbassek).- Sputtering Yields (W. Eckstein).- Results of Molecular Dynamics Calculations (H.M. Urbassek).- Energy and Angular Distributions of Sputtered Species (H. Gnaser).- Chemical Sputtering (W. Jacob, J. Roth).- Electronic Sputtering with Swift Heavy Ions (W. Assmann, M. Toulemonde, C. Trautmann) Subject Index
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