Shiban Tiku,
Dhrubes Biswas
III-V Integrated Circuit Fabrication Technology
Gebonden EN 2016 9789814669306Niet leverbaar.
Samenvatting
GaAs processing has reached a mature stage. New semiconductor compounds are emerging that will dominate future materials and device research, although the processing techniques used for GaAs will still remain relevant. This book covers all aspects of the current state of the art of III-V processing, with emphasis on HBTs. It is aimed at practicing engineers and graduate students and engineers new to the field of III-V semiconductor IC processing. The book's primary purpose is to discuss all aspects of processing of active and passive devices, from crystal growth to backside processing, including lithography, etching, and film deposition.
Specificaties
ISBN13:9789814669306
Taal:EN
Bindwijze:Gebonden
Aantal pagina's:716
Uitgever:Pan Stanford Publishing Pte Ltd
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