MEMS Materials and Processes Handbook

Introduction – Reza Ghodssi and Pinyen Lin.- The MEMS Design Process – Tina Lamers and Beth Pruitt.- Additive Processes for Semiconductors and Dielectric Materials – Chris Zorman, Robert C. Roberts and Li Chen.- Additive Processes for Metals – David Arnold, Monika Saumer and Yong Kyu-Yoon.- Additive Processes for Polymeric Materials – Ellis Meng, Xin Zhang, and William Benard.- Additive Processes for Piezoelectric Materials – Ronald Polcawich, Jeff Pulskamp, Takashi Mineta, and Yoichi Haga.- Materials and Processes in Shape-Memory Alloy - Takashi Mineta and Yoichi Haga.- Dry Etching for Micromachining Applications – Srinivas Tadigadapa and Franz Laermer.- MEMS Wet-Etch Processes and Procedures – David Burns.- MEMS Lithography and Micromachining Techniques - Daniel Hines, Nathan Siwak, Lance Mosher and Reza Ghodssi.- Doping - Alan D. Raisanen.- Wafer Bonding – Shawn Cunningham and Mario Kupnik .- MEMS Packaging Materials – Ann Garrison Darrin and Robert Osiander.- Surface Treatment and Planarization – Pinyen Lin, Roya Maboudian, Carlo Carraro, Fan-Gang Tseng, Pen-Cheng Wang, and Yongqing Lan.- MEMS Process Integration – Michael Huff, Stephen Bart, and Pinyen Lin.