R.F. Wolffenbuttel
Silicon Sensors and Circuits
On-chip compatibility
Gebonden Engels 1995 1995e druk 9780412709708Levertijd ongeveer 9 werkdagen
Gratis verzonden
Samenvatting
Silicon sensors integrated with readout circuits on one chip are now being considered for a wide and growing range of applications. Technological compatibility constraints and the need for economic large-scale production are now the major concerns if these devices are to become widely used in industry and medicine. This is the first book to attempt to evaluate the real prospects and limitations of integrated silicon smart sensors. It provides a thorough introduction to and review of, the field, covering both technical and economic issues critical to the future success of this technology.
Specificaties
ISBN13:9780412709708
Taal:Engels
Bindwijze:gebonden
Aantal pagina's:314
Uitgever:Springer Netherlands
Druk:1995
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Inhoudsopgave
On-chip functional integration. Development of compatible micromachining processes in silicon. Compatibility of piezoelectric zinc oxide with silicon IC processing. Economics of on-chip functional integration. On-chip functional integration in micromechanical sensors. Sensor and circuit integration in biomedical applications. Smart sensors in automobiles. Conclusions. Glossary. Index.
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