Silicon-Molecular Beam Epitaxy

Volume I

Gebonden Engels 2017 1e druk 9781315897516
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Samenvatting

This subject is divided into two volumes. Volume I is on homoepitaxy with the necessary systems, techniques, and models for growth and dopant incorporation. Three chapters on homoepitaxy are followed by two chapters describing the different ways in which MBE may be applied to create insulator/Si stackings which may be used for three-dimensional circuits. The two remaining chapters in Volume I are devoted to device applications. The first three chapters of Volume II treat all aspects of heteroepitaxy with the exception of the epitaxial insulator/Si structures already treated in volume I.

Specificaties

ISBN13:9781315897516
Taal:Engels
Bindwijze:Gebonden
Aantal pagina's:260
Uitgever:CRC Press
Druk:1

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        Silicon-Molecular Beam Epitaxy