Lucille A. Giannuzzi,
North Carolina State University
Introduction to Focused Ion Beams
Instrumentation, Theory, Techniques and Practice
Paperback Engels 2010 9781441935748Levertijd ongeveer 9 werkdagen
Gratis verzonden
Samenvatting
Introduction to Focused Ion Beams is geared towards techniques and applications. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and dual platform instruments.
Specificaties
ISBN13:9781441935748
Taal:Engels
Bindwijze:paperback
Aantal pagina's:358
Uitgever:Springer US
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Inhoudsopgave
The Focused Ion Beam Instrument.- Ion - Solid Interactions.- Focused Ion Beam Gases for Deposition and Enhanced Etch.- Three-Dimensional Nanofabrication Using Focused Ion Beams.- Device Edits and Modifications.- The Uses of Dual Beam FIB in Microelectronic Failure Analysis.- High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy.- FIB for Materials Science Applications - a Review.- Practical Aspects of FIB Tem Specimen Preparation.- FIB Lift-Out Specimen Preparation Techniques.- A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method.- Dual-Beam (FIB-SEM) Systems.- Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS).- Quantitative Three-Dimensional Analysis Using Focused Ion Beam Microscopy.- Application of FIB in Combination with Auger Electron Spectroscopy.
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