Local Electrode Atom Probe Tomography

<p>Preface<br>Acknowledgements<br>Foreword<br>Abbreviations</p><p>Chapter 1. History of APT and LEAP<br>1.1 Introduction<br>1.2 Ancestry of the Local Electrode Atom Probe<br>1.2.1 Early History and the Field Electron Emission Microscope (~1935)<br>1.2.2 Field Ion Microscope: The First Images of Atoms (1955)<br>1.2.3 Atom Probe Field Ion Microscope (1967)<br>1.2.4 The Advent of Atom Probe Tomography<br>1.2.5 The Position Sensitive Atom Probe (1988)<br>1.2.6 Electron Beam Pulsed Atom Probe<br>1.2.7 The Scanning Atom Probe<br>1.2.8 The Local Electrode Atom Probe (2001)<br>1.3 The State of Instrumentation<br>1.3.1 The Growth of the Local Electrode Atom Probe<br>1.3.2 Laser Pulsing<br>1.3.3 Fundamental Considerations for Design of Instrumentation<br>1.3.4 Reflectron-Based Instruments<br>1.4 FIB-Based Specimen Preparation<br>1.5 Concluding Remarks<br>References</p><p>Chapter 2. Specimen Preparation<br>2.1 Introduction<br>2.2 Electropolishing<br>2.3 Needles versus Microtips<br>2.4 Electrostatic Discharge Considerations<br>2.5 Focused Ion Beam Methods<br>2.5.1 Capping Considerations &amp; Damage<br>2.5.2 Standard Lift-Out Process<br>2.5.3 Sharpening Process<br>2.5.4 FIB Deprocessing<br>2.6 Hybrid Transmission Electron Microscopy / Atom Probe Tomography<br>2.7 Summary<br>References</p><p>Chapter 3. Design &amp; Instrumentation<br>3.1 Introduction<br>3.2 How Atom Probes Work<br>3.3 LEAP Performance Parameters<br>3.3.1 Field of View<br>3.3.2 Mass Resolving Power<br>3.3.3 Data Collection Rate<br>3.3.4 Model Comparison<br>3.4. Instrumentation in the LEAP<br>3.4.1 Local Electrode<br>3.4.2 Detection and Imaging<br>3.4.3. Transfer and Storage of Consumables<br>3.4.4. Field Evaporation Systems<br>3.4.5 Ancillary Systems<br>3.5 Summary<br>References</p><p>Chapter 4. Data Collection<br>4.1 Introduction<br>4.2 Data Quality Considerations<br>4.3 Analysis Yield Considerations<br />4.4 Experimental Parameters<br>4.5 How to Start Your Investigation of Any New Material<br>4.6 Brief Overview of LEAP Operation:  Data Collection<br>4.6.1 Voltage Acquisition<br>4.6.2 Laser Acquisition<br>4.6.3 Now You Are Atom Probing<br>References</p><p>Chapter 5. Data Processing and Reconstruction<br>5.1 Introduction<br>5.2 A Word on Data Files and Work Flow<br>5.3 Conversion from Detector Space to Specimen Space Coordinates<br>5.3.1 Selection of Depth and Areal Regions<br>5.3.2 Spectral Calibration<br>5.3.3 Chemical Identification &amp; Ranging<br>5.3.4 Spatial Reconstruction:  Projection and Depth Scaling<br>5.3.5 Wide Angle Reconstruction Protocols<br>5.3.6 Tangential Discontinuity<br>5.3.7 Reconstruction Explorer<br>5.3.8 Creation of ROOT and POS Files<br>5.4 Discussion of Spatial Resolution and Spatial Positioning<br>5.4.1 Spatial Resolution<br>5.4.2 Spatial Positioning (Non-Specimen Dependent) <br>5.4.3 Spatial Positioning (Specimen Dependent) <br>5.5 A Word on Density Relaxation<br>5.6 Reconstruction Case Study:  NIST Standard Reference Material 2134<br>5.6.1 Reconstruction Parameter Discussion<br>5.6.2 Experiment and Analysis Details<br>References</p><p>Chapter 6. Selected Analysis Topics<br>6.1 Introduction<br>6.2 Spectral Analysis<br>6.2.1 Ranging<br>6.2.2 Practical Considerations for Detection Levels<br>6.2.3 Peak Decomposition<br>6.3 Concentration Space Analyses<br>6.3.1 Gridding, Voxels, and Delocalization<br>6.3.2 Interface Creation and Interfacial Roughness<br>6.3.3 Effects of Delocalization on Planar Surfaces<br>6.3.4 The Proximity Histogram<br>6.4 Solute Analysis:  Cluster Detection Method<br>6.5 Spatial Distribution Maps<br>6.6 Application of Spatial Distribution Maps<br>References</p><p>Chapter 7. Applications of the Local Electrode Atom Probe<br>7.1 Metals<br>7.2 Catalytic Materials<br>7.3 Ceramic and Geological Materials<br />7.4 Semiconductor Materials<br>7.5 Organics and Biological Materials<br>7.6 Composite Structures/Devices<br>7.7 Conclusions<br>References</p><p>Appendix A.  Data File Formats<br>Appendix B. Field Evaporation<br>Appendix C. Reconstruction Geometry<br>Appendix D. Mass Spectral Performance<br>Appendix E. Additional Considerations for LEAP Operation</p><p>Glossary</p><p>Index<br></p>