Multilayer Ceramic Substrate - Technology for VLSI Package/Multichip Module

Introduction. Introduction. Past and current studies. Modelling of fine powder mixing and measurement of the degree of mixing. Object of this study. Study of mixing models. Simulation of the flowpath in the doctor-blade and its application to raising the precision of green sheet thickness. Object of the study. Experimental procedure. Improving dimensional precision by firing in a reducing atmosphere. Purpose of the studies. Experimental methods. Effect of forming and firing conditions on the dimensions of ceramics. Object of the study. Experimental method. Improving the strength of tungsten metallization on alumina ceramics. Purpose of the studies. Experimental methods. Electrical insulation between fine metallization on alumina ceramics, and its protection. Purpose of the study. Experimental methods. Summary. Guidelines obtained by production process. Overall summary. References. Index.