Zheng Cui
Nanofabrication
Principles, Capabilities and Limits
Paperback Engels 2018 2e druk 9783319818757Levertijd ongeveer 9 werkdagen
Gratis verzonden
Samenvatting
This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication challenges.
Specificaties
ISBN13:9783319818757
Taal:Engels
Bindwijze:paperback
Uitgever:Springer International Publishing
Druk:2
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Inhoudsopgave
<p>1. Introduction.- 2. Nanofabrication by Photons.- 3. Nanofabrication by Electron Beam.- 4. Nanofabrication by Ion Beam.- 5. Nanofabrication by Scanning Probes.- 6. Nanofabrication by Replication.- 7. Nanoscale Pattern Transfer by Etching.- 8. Nanoscale Pattern Transfer by Deposition.- 9. Indirect Nanofabrication.- 10. Nanofabrication by Self-Assembly.- 11. Applications of Nanofabrication Technologies.</p>
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