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Predictive Simulation of Semiconductor Processing

Status and Challenges

Gebonden Engels 2004 2004e druk 9783540204817
€ 240,99
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Samenvatting

Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.

Specificaties

ISBN13:9783540204817
Taal:Engels
Bindwijze:Gebonden
Aantal pagina's:490
Uitgever:Springer Berlin Heidelberg
Druk:2004

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          Predictive Simulation of Semiconductor Processing