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Wafer Bonding

Applications and Technology

Paperback Engels 2011 9783642059155
€ 396,99
Levertijd ± 9 werkdagen
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The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off. The non-specialist will learn about the basics of wafer bonding and its various application areas, while the researcher in the field will find up-to-date information about this fast-moving area, including relevant patent information.

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€ 396,99
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          Wafer Bonding