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Design and Manufacturing of Active Microsystems

Paperback Engels 2014 2011e druk 9783642267383
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Samenvatting

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.

Specificaties

ISBN13:9783642267383
Taal:Engels
Bindwijze:paperback
Aantal pagina's:444
Uitgever:Springer Berlin Heidelberg
Druk:2011

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Inhoudsopgave

1. Introduction.- 2. Design and Construction.- 3. Guiding and Measuring in Active Microsystems.- 4. Manufacturing and Fabrication.- 5. Microassembly.- 6.Industrial Applications.

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        Design and Manufacturing of Active Microsystems