Introduction to Microsystem Design

Paperback Engels 2013 2011e druk 9783642268526
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The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems. For quick reference equations are presented in tables which are found in an index at the end of this book.

Specificaties

ISBN13:9783642268526
Taal:Engels
Bindwijze:paperback
Aantal pagina's:322
Uitgever:Springer Berlin Heidelberg
Druk:2011

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Inhoudsopgave

Preface.- Notations and symbols.- Introduction.- Scaling Laws.- Elastic deformations.- Thin Films.- Conductor Paths.- Membranes.- Strain gauges on membranes.- Beams.- Vibrations.- Capillaries.- Capacitive forces.- Piezoelectric effect.- Thermal actuators.- Micro optics.- Diffusion.- Micro valves.- Micro pumps.- Micro dosing.- Analogies between physical domains.- Mechanical devices for electronics.- Pressure sensors.- Flow sensors.- Inertial sensors.

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        Introduction to Microsystem Design