Alexey Ivanov
Silicon Anodization as a Structuring Technique
Literature Review, Modeling and Experiments
Paperback Engels 2017 9783658192372Levertijd ongeveer 9 werkdagen
Gratis verzonden
Samenvatting
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.
Specificaties
ISBN13:9783658192372
Taal:Engels
Bindwijze:paperback
Uitgever:Springer Fachmedien Wiesbaden
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Inhoudsopgave
Silicon Anodization: State of the Art.- Experimental, Characterization and Simulation Methods.- Microscale Study of Anodization Process.- Anodization Process as a Structuring Technique: Experiments and Simulation.
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