Maria Stepanova,
Steven Dew
Nanofabrication
Techniques and Principles
Paperback Engels 2014 2012e druk 9783709116661Levertijd ongeveer 9 werkdagen
Gratis verzonden
Samenvatting
Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.
Specificaties
ISBN13:9783709116661
Taal:Engels
Bindwijze:Paperback
Aantal pagina's:344
Uitgever:Springer Vienna
Druk:2012
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