Huiliang Cao
Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope
Gebonden Engels 2023 9789811992469Levertijd ± 9 werkdagen
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Samenvatting
This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding.
It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.
Specificaties
ISBN13:9789811992469
Taal:Engels
Bindwijze:Gebonden
Aantal pagina's:224
Uitgever:Springer Nature Singapore
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Inhoudsopgave
Chapter 1 Introduction.- Chapter 2 Silicon-based MEMS gyroscope structure and working principle.- Chapter 3 Silicon-based MEMS gyroscope structure noise analysis and system model.- Chapter 4 Silicon-based MEMS gyroscope quadrature error correction technology and optimization.- Chapter 5 Silicon-based MEMS gyroscope sense closed loop and frequency tuning technology.- Chapter 6 Temperature influence on MEMS gyroscope and suppression method.- Chapter 7 Silicon-based MEMS gyroscope monitoring circuit design and test technology.- References.
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